*dfmRunMode: CMP
*dfmRunDir: .
*dfmLayoutPaths: ../Shared/Design/fullchip.oas
*dfmLayoutSystem: OASIS
*dfmLayoutPrimary: top
*dfmCmpaSummaryReportConfiguration: 0 w {} 1 0
*dfmUseMetalLayerStack: 1
*dfmDFMDbSaveLayers: Original 1 Devices 0 Analyze 1 Measure 0 Property 1 Density 0
*dfmAutoHalo: 0
*dfmClipToArea: 0
*dfmMGCCMPMetalLayerCount: 6
*dfmTSMCCMPMetalLayerList: {ltype {{M 1} {M 2} {M 3}}} {lname {M1 M2 M3}} {lnum {31 32 33}} {dmxnum {150.1 150.2 150.3}} {vnum {51 52 {}}} {opc {31.7 32.7 33.7}} {nonopc {31.1 32.1 33.1}} {rthick {1 2 2}} {dish {{} {} {}}} {erosion {{} {} {}}} {dof {{} {} {}}} {antidish {{} {} {}}}
*dfmTSMCN32N28CMPMetalLayerList: {ltype {{M 1} {M 2} {M 3}}} {lname {M1 M2 M3}} {lnum {31.0 32.0 33.0}} {dmxnum {150.1 150.2 150.3}} {vnum {51 52 {}}} {opc {31.7 32.7 33.7}} {nonopc {31.1 32.1 33.1}} {rthick {1 2 2}} {dish {{} {} {}}} {erosion {{} {} {}}} {dof {{} {} {}}} {antidish {{} {} {}}}
*dfmMGCCMPMetalLayerList: {ltype {{M 1} {M 2} {M 3} {M 4} {M 5} {M 6}}} {lname {M1 M2 M3 M4 M5 M6}} {lnum {11 13 15 17 19 21}} {dmxnum {150.1 150.2 150.3 150.4 150.5 150.6}} {vnum {12 14 16 18 20 {}}} {opc {31.7 32.7 33.7 34.7 35.7 36.7}} {nonopc {31.1 32.1 33.1 34.1 35.1 36.1}} {rthick {1 2 2 2 2 2}} {dish {10 11 12 {} {} {}}} {erosion {20 21 22 {} {} {}}} {dof {30 31 32 {} {} {}}} {antidish {{} {} {} {} {} {}}}
*dfmCMPRecipeFile: ./recipe.in
*cmnShowOptions: 1
*cmnUsePrecision: 1
*cmnPrecision: 2000
*cmnResolution: 5
*cmnRunRVEOnLocalHost: 0
*dfmStartRVE: 1
*cmnRunMT: 1
  

