#Built with v2017.3_26.0021; OMC number 0
version 10
engine TCCcalc
opticalsystem 0.193 1.2 0.75
defocuslevels 5 -0.1 0.02
magnification 2.
approxorder 10
forceKernelSymmetry 1
hoodpix 1.280
kerngrid 0.010
illumtype STANDARD
film 0.09 1.71 -0.015 "90 nm JSR 1941J"
substrate 1.492 -0.684
beamfocus 0
vectormodelflag 0
ambient 1.333
